Production Process of Semiconductor Equipment Frames and Sheet Metal Parts

Metal Production Process in the Semiconductor Equipment Industry: From Engineering Design to On-Site Production and Spray Coating Assembly

In the semiconductor industry, the production of supporting equipment is equally critical. Semiconductor equipment manufacturers rely on high-quality frames and metal sheet parts to ensure their equipment's performance and reliability. This article will detail the key steps in the production of semiconductor equipment frames and metal sheet parts: engineering design decomposition, on-site production, and spray coating assembly.

Engineering Design Decomposition

The first step in the production process is engineering design and drawing decomposition. This stage includes:

  1. Requirement Analysis: Engineers need to clearly understand the specific requirements for the equipment frames and sheet metal parts, such as dimensions, materials, and mechanical properties.
  2. Design Scheme: Based on the requirements, an initial design is created and detailed drawings are produced using CAD software. These drawings include structural design, connection methods, and manufacturing processes.
  3. Drawing Decomposition: The complete design drawings are broken down into executable steps. These steps cover every manufacturing phase, from material selection to final assembly.

On-Site Production

On-site production is the core phase, involving the entire production process from raw materials to finished products. The main steps include:

Material Preparation

  1. Material Selection: Select appropriate materials based on design requirements, such as stainless steel, aluminum alloys, etc.
  2. Cutting Raw Materials: Use high-precision cutting equipment to cut large raw materials into smaller pieces suitable for subsequent processing. Precision cutting is essential to minimize material waste.

Laser Cutting

  1. Programming and Setup: Write cutting programs based on the design drawings and set up the cutting equipment.
  2. Laser Cutting: Utilize high-energy laser beams to cut the material. Laser cutting allows for precise and complex shapes with smooth cut surfaces.
  3. Quality Inspection: After cutting, conduct quality checks to ensure the accuracy and surface quality meet the requirements.

Bending

  1. Mold Preparation: Prepare the appropriate bending molds based on design requirements.
  2. Bending Operation: Place the material on the bending machine and apply force to bend the material along the mold shape. Control the force and angle precisely to ensure bending accuracy.
  3. Inspection and Adjustment: After bending, check the dimensions and shape, making necessary adjustments to ensure the final shape meets design requirements.

Precision Welding

  1. Preparation and Alignment: Align and fix the parts that need welding on the welding jig.
  2. Welding Operation: Use high-precision welding equipment, such as laser welding and micro welding. Strictly control welding parameters to ensure welding quality.
  3. Weld Inspection: After welding, inspect the welds to ensure they are firm and free of defects like pores and cracks.

Machining Center

  1. Programming and Setup: Write CNC programs based on processing requirements and set up the machining center.
  2. Precision Machining: Use the machining center for drilling, milling, turning, and other operations. Ensure precision in each operation to meet the design dimensions and shapes.
  3. Final Inspection: After machining, conduct a thorough inspection of the parts, including dimensions, shapes, and surface quality, to ensure all parameters meet the design standards.

Spray Coating Assembly

After production and inspection, the metal frames and sheet metal parts undergo spray coating and assembly. This process includes:

  1. Spray Coating Protective Layer: Apply a protective layer to the surface of the frames and sheet metal parts to protect them from environmental factors such as humidity and chemicals. Common materials include polyimide and epoxy resin.
  2. Assembly and Welding: Assemble the parts and weld them together. This process requires precise welding techniques to ensure each connection is secure and reliable.
  3. Final Testing and Quality Inspection: After assembly, conduct final testing, including mechanical performance tests, reliability tests, and appearance checks, to ensure each part meets quality standards.

Conclusion

The production of semiconductor equipment frames and metal sheet parts is a highly complex and precise process. From initial engineering design to on-site production and final spray coating assembly, each step requires strict control and management. Through the tight coordination of all stages, high-quality semiconductor equipment parts are produced to meet market and customer demands.

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